Room-temperature tilted-target sputtering deposition of highly transparent and low sheet resistance Al doped ZnO electrodes

TitleRoom-temperature tilted-target sputtering deposition of highly transparent and low sheet resistance Al doped ZnO electrodes
Publication TypeJournal Article
Year of Publication2015
AuthorsNagiri, Ravi Chandra Raju, Yambem Soniya D., Lin Qianqian, Burn P. L., and Meredith Paul
JournalJournal of Materials Chemistry C
URLhttp://pubs.rsc.org/en/content/articlelanding/2015/tc/c5tc00695c#!divAbstract
DOI10.1039/C5TC00695C