Fabrication of shadow masks for top contact organic FETs using deep reactive ion etching

TitleFabrication of shadow masks for top contact organic FETs using deep reactive ion etching
Publication TypeJournal Article
Year of Publication2010
AuthorsAljada, M., Mutkins K., Burn P. L., and Meredith Paul
JournalJournal of Micromechanics and Microengineering
Volume20
Issue7
Pagination075037